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ASTM E673-03

Standard Terminology Relating to Surface Analysis
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1.1 This terminology is related to the various disciplines involved in surface analysis.

1.2 The definitions listed apply to:

  • (a) Auger electron spectroscopy (AES),
  • (b) X-ray photoelectron spectroscopy (XPS),
  • (c) ion-scattering spectroscopy (ISS),
  • (d) secondary ion mass spectrometry (SIMS), and
  • (e) energetic ion analysis (EIA).

1.1 This terminology is related to the various disciplines involved in surface analysis.

1.2 The definitions listed apply to:

  • (a) Auger electron spectroscopy (AES),
  • (b) X-ray photoelectron spectroscopy (XPS),
  • (c) ion-scattering spectroscopy (ISS),
  • (d) secondary ion mass spectrometry (SIMS), and
  • (e) energetic ion analysis (EIA).
SDO ASTM: ASTM International
Document Number E673
Publication Date Dec. 1, 2003
Language en - English
Page Count 10
Revision Level 03
Supercedes
Committee E42.02
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