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ASTM F143-73(1978)

Method of Test for Thickness of Epitaxial Layers of Silicon by Measurement of Stacking Fault Dimension (Withdrawn 1985)

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ASTM F143-73(1978)

Method of Test for Thickness of Epitaxial Layers of Silicon by Measurement of Stacking Fault Dimension (Withdrawn 1985)

PUBLISH DATE 2010
ASTM F143-73(1978)

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SDO ASTM: ASTM International
Document Number F143
Publication Date Dec. 31, 2010
Language en - English
Page Count
Revision Level 73(1978)
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Committee .
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