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Advanced technical ceramics. Methods of test for ceramic coatings -- Determination of chemical composition by electron probe microanalysis (EPMA)
This European Standard describes methods for chemical analysis of ceramic coatings by means of electron probe microanalysis (EPMA) using a scanning electron microscope (SEM) or an electron probe microanalyser.
The methods described are limited to the examination of *single layer coatings* when the analysis is carried out normal to the sample surface, but graded and multilayer coatings may also be analysed in cross-section if the thickness of the individual layers or gradations are greater than the maximum width of the volume of material within which characteristic or fluorescent X-rays are generated.
NOTE This method can also be used for the analysis of bulk materials.
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