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BSI BS EN 62047-1:2016

Semiconductor devices. Micro-electromechanical devices -- Terms and definitions
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BSI BS EN 62047-1:2016

Semiconductor devices. Micro-electromechanical devices -- Terms and definitions

PUBLISH DATE 2016
PAGES 36
BSI BS EN 62047-1:2016
IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.
SDO BSI: British Standards Institution
Document Number EN 62047-1
Publication Date April 30, 2016
Language en - English
Page Count
Revision Level
Supercedes
Committee EPL/47
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