BSI BS EN 62047-1:2016

Current Revision
Semiconductor devices. Micro-electromechanical devices -- Terms and definitions

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BSI BS EN 62047-1:2016

Semiconductor devices. Micro-electromechanical devices -- Terms and definitions

PUBLISH DATE 2016
PAGES 36
BSI BS EN 62047-1:2016

IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices.

This edition includes the following significant technical changes with respect to the previous edition:

  • a) removal of ten terms;
  • b) revision of twelve terms;
  • c) addition of sixteen new terms.
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