BSI BS IEC 62047-28:2017

Current Revision
Semiconductor devices. Micro-electromechanical devices -- Performance testing method of vibration-driven MEMS electret energy harvesting devices

Best Price Guarantee Jul 22, 2020 English 20 Pages

Sub Total (1 Item(s)) $ 0.00
Estimated Shipping $ 0.00
Total (Pre-Tax) $ 0.00

You own the digital copy of this edition

View in Library
or
British Standards Institution Logo

BSI BS IEC 62047-28:2017

Semiconductor devices. Micro-electromechanical devices -- Performance testing method of vibration-driven MEMS electret energy harvesting devices

PUBLISH DATE 2020
PAGES 20
BSI BS IEC 62047-28:2017

IEC 62047-28:2017(E) specifies terms and definitions, and a performance testing method of vibration driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry or any application.

This document applies to vibration driven electret energy harvesting devices whose electrodes with a gap below 1 000 ?m are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography or deposition.

Loading...

Failed to load document history.

Publish Date Document Id Type View