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BSI BS IEC 62047-52:2026

Semiconductor devices - Micro-electromechanical devices -- Part 52: Biaxial tensile testing method for stretchable MEMS
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BSI BS IEC 62047-52:2026

Semiconductor devices - Micro-electromechanical devices -- Part 52: Biaxial tensile testing method for stretchable MEMS

PUBLISH DATE 2026
PAGES 18
BSI BS IEC 62047-52:2026

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SDO BSI: British Standards Institution
Document Number IEC 62047-52
Publication Date March 10, 2026
Language en - English
Page Count 18
Revision Level
Supercedes
Committee EPL/47
Publish Date Document Id Type View
March 10, 2026 BS IEC 62047-52:2026 Revision