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BSI BS EN ISO 14644-10:2022

Cleanrooms and associated controlled environments -- Part 10: Assessment of surface cleanliness for chemical contamination
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BSI BS EN ISO 14644-10:2022

Cleanrooms and associated controlled environments -- Part 10: Assessment of surface cleanliness for chemical contamination

PUBLISH DATE 2022
PAGES 42
BSI BS EN ISO 14644-10:2022
This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices. NOTE 1    For the purpose of this document, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this document does not cover the interaction between the contamination and the surface. NOTE 2    This document does not include the contamination generation process or any time-dependent influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance.
SDO BSI: British Standards Institution
Document Number ISO 14644-10
Publication Date July 31, 2022
Language en - English
Page Count 42
Revision Level
Supercedes
Committee LBI/30
Publish Date Document Id Type View
July 31, 2022 BS EN ISO 14644-10:2022 Revision
April 30, 2013 BS EN ISO 14644-10:2013 Revision