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BSI BS EN ISO 14644-2:2015

Cleanrooms and associated controlled environments -- Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
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BSI BS EN ISO 14644-2:2015

Cleanrooms and associated controlled environments -- Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration

PUBLISH DATE 2016
PAGES 26
BSI BS EN ISO 14644-2:2015

This part of ISO 14644 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.

This part of ISO 14644 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.

SDO BSI: British Standards Institution
Document Number ISO 14644-2
Publication Date Jan. 31, 2016
Language en - English
Page Count 26
Revision Level
Supercedes
Committee LBI/30
Publish Date Document Id Type View
Jan. 31, 2016 BS EN ISO 14644-2:2015 Revision
Dec. 15, 2000 BS EN ISO 14644-2:2000 Revision