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Microbeam analysis. Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)
This document defines the most important quantities that characterize an energy-dispersive X-ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts.
This document is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization.
This document specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA).
The procedure used for the actual analysis is outlined in ISO 22309[ 2] and ASTM E1508[ 3] and is outside the scope of this document.
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