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Surface chemical analysis. High-resolution Auger electron spectrometers. Calibration of energy scales for elemental and chemical-state analysis
This International Standard specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers used for elemental and chemical state analysis at surfaces.
It also specifies a calibration schedule for:
It is applicable only to those instruments incorporating an ion gun for sputter cleaning. It is not applicable to instruments with kinetic energy scale errors significantly non-linear with energy. Neither is it applicable to those instruments operated at relative resolutions poorer than 0,2% in the constant ΔE/E mode or 1,5 eV in the constant ΔE mode, those requiring tolerance limits of ± 0,05 eV or less, nor to those with an electron gun that cannot be operated in the energy range 5 keV to 10 keV.
It does not provide a full calibration check for confirming the energy measured at each addressable point on the energy scale, this being performed according to the manufacturer's recommendations.
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