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BSI BS ISO 18114:2021

Surface chemical analysis. Secondary-ion mass spectrometry. Determination of relative sensitivity factors from ion-implanted reference materials
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BSI BS ISO 18114:2021

Surface chemical analysis. Secondary-ion mass spectrometry. Determination of relative sensitivity factors from ion-implanted reference materials

PUBLISH DATE 2021
PAGES 14
BSI BS ISO 18114:2021

This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.

The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.

SDO BSI: British Standards Institution
Document Number ISO 18114
Publication Date May 18, 2021
Language en - English
Page Count 14
Revision Level
Supercedes
Committee CII/60
Publish Date Document Id Type View
May 18, 2021 BS ISO 18114:2021 Revision
Aug. 7, 2003 BS ISO 18114:2003 Revision