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BSI BS ISO 21859:2019

Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment
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BSI BS ISO 21859:2019

Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment

PUBLISH DATE 2019
PAGES 10
BSI BS ISO 21859:2019

This document specifies a test method for plasma resistance of ceramic components in semiconductor manufacturing equipment. It is applicable to ceramic components of plasma-resistant components in dry etching chambers used in semiconductor manufacturing.

SDO BSI: British Standards Institution
Document Number ISO 21859
Publication Date June 19, 2019
Language en - English
Page Count
Revision Level
Supercedes
Committee RPI/13
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