BSI BS EN ISO 25178-604:2025

Current Revision
Geometrical product specifications (GPS). Surface texture: Areal -- Design and characteristics of non-contact (coherence scanning interferometry) instruments

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BSI BS EN ISO 25178-604:2025

Geometrical product specifications (GPS). Surface texture: Areal -- Design and characteristics of non-contact (coherence scanning interferometry) instruments

PUBLISH DATE 2025
PAGES 32
BSI BS EN ISO 25178-604:2025

This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography.

Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.

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