BSI PD IEC/PAS 62276:2002

Withdrawn Revision
Single crystal wafers applied for surface acoustic wave device. Specification and measuring method

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BSI PD IEC/PAS 62276:2002

Single crystal wafers applied for surface acoustic wave device. Specification and measuring method

PUBLISH DATE 2002
PAGES 40
BSI PD IEC/PAS 62276:2002

Applies to single crystal wafers intended for manufacturing substrates made of synthetic quartz crystal, lithium niobate, lithium tantalate, lithium tetraborate crystals for surface acoustic wave (SAW) filters and resonators.

Lays down specifications and measuring methods.

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