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BSI PD IEC TR 63258:2021

Nanotechnologies. A guideline for ellipsometry application to evaluate the thickness of nanoscale films
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BSI PD IEC TR 63258:2021

Nanotechnologies. A guideline for ellipsometry application to evaluate the thickness of nanoscale films

PUBLISH DATE 2021
PAGES 24
BSI PD IEC TR 63258:2021

This document, which is a Technical Report, is focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films.

This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.

This document includes:

  • Outlines of the ellipsometry procedures,

  • Methods of interpretation of results and discussion of data analysis, and

  • Case studies.

SDO BSI: British Standards Institution
Document Number IEC TR 63258
Publication Date March 26, 2021
Language en - English
Page Count 24
Revision Level
Supercedes
Committee NTI/1
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