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BSI PD IEC/TS 62622:2012

Nanotechnologies. Description, measurement and dimensional quality parameters of artificial gratings
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BSI PD IEC/TS 62622:2012

Nanotechnologies. Description, measurement and dimensional quality parameters of artificial gratings

PUBLISH DATE 2013
PAGES 44
BSI PD IEC/TS 62622:2012

This technical specification specifies the generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features, and provides guidance on the categorization of measurement and evaluation methods for their determination.

This specification is intended to facilitate communication among manufacturers, users, and calibration laboratories dealing with the characterization of the dimensional quality parameters of artificial gratings used in nanotechnology.

This specification supports quality assurance in the production and use of artificial gratings in different areas of application in nanotechnology. Whilst the definitions and described methods are universal to a large variety of different gratings, the focus is on one-dimensional (1D) and two-dimensional (2D) gratings.

SDO BSI: British Standards Institution
Document Number IEC/TS 62622
Publication Date Feb. 28, 2013
Language en - English
Page Count
Revision Level
Supercedes
Committee NTI/1
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