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BSI PD ISO/TR 19319:2013

Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
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BSI PD ISO/TR 19319:2013

Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

PUBLISH DATE 2013
PAGES 126
BSI PD ISO/TR 19319:2013

This Technical Report describes:

  1. Functions and their relevance to lateral resolution:

    1. Point spread function (PSF) — see 4.1.1

    2. Line spread function (LSF) — see 4.1.2

    3. Edge spread function (ESF) — see 4.1.3

    4. Modulation transfer function (MTF) — see 4.1.4

    5. Contrast transfer function (CTF) — see 4.1.5.

  2. Experimental methods for the determination of lateral resolution and parameters related to lateral resolution:

    1. Imaging of a narrow stripe — see 4.2

    2. Imaging of a sharp edge — see 4.3

    3. Imaging of square-wave gratings — see 4.4.

  3. Physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy — see Clauses 5 and 6.

SDO BSI: British Standards Institution
Document Number ISO/TR 19319
Publication Date March 31, 2013
Language en - English
Page Count
Revision Level
Supercedes
Committee CII/60
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