IEC 62047-21 Ed. 1.0 b:2014

Current Revision
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials

Best Price Guarantee Jun 19, 2014 EN/FR 30 Pages

Sub Total (1 Item(s)) $ 0.00
Estimated Shipping $ 0.00
Total (Pre-Tax) $ 0.00
View in Library
or
International Electrotechnical Commission Logo

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials

PUBLISH DATE 2014
PAGES 30

Semiconductor devices - Micro-electromechanical devices - Part 21:

Test method for Poisson's ratio of thin film MEMS materials

IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials.

The materials have lengths and widths less than 10 mm and thicknesses less than 10 µm.

Loading...

Failed to load document history.

Publish Date Document Id Type View