IEC 62047-32 Ed. 1.0 b:2019

Current Revision
Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators

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Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators

PUBLISH DATE 2019
PAGES 42

Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators.

IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators.

The statements made in this document apply to the development and manufacture of MEMS resonators.

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