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IEC 62047-34 Ed. 1.0 en:2019

Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer
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IEC 62047-34 Ed. 1.0 en:2019

Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer

PUBLISH DATE 2019
PAGES 20
IEC 62047-34 Ed. 1.0 en:2019

Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer

IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices.

This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.

SDO IEC: International Electrotechnical Commission
Document Number IEC 62047
Publication Date April 1, 2019
Language en - English
Page Count
Revision Level 1.0
Supercedes
Committee 47F
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