IEC 62047-56 Ed. 1.0 en:2026

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Semiconductor devices - Micro-electromechanical devices - Part 56: Test method for characteristics of MEMS metal oxide semiconductor (MOS) type gas sensor

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IEC 62047-56 Ed. 1.0 en:2026

Semiconductor devices - Micro-electromechanical devices - Part 56: Test method for characteristics of MEMS metal oxide semiconductor (MOS) type gas sensor

PUBLISH DATE 2026
IEC 62047-56 Ed. 1.0 en:2026

IEC 62047-56:2026 specifies the requirements and test method for characteristics of MEMS metal oxide semiconductor (MOS) type gas sensor.

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