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IEC/TR 63258 Ed. 1.0 en:2021

Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films
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IEC/TR 63258 Ed. 1.0 en:2021

Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

PUBLISH DATE 2021
IEC/TR 63258 Ed. 1.0 en:2021

Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films.

This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.

SDO IEC: International Electrotechnical Commission
Document Number IEC/TR 63258
Publication Date March 1, 2021
Language en - English
Page Count
Revision Level 1.0
Supercedes
Committee 113
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