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Nanomanufacturing - Key control characteristics - Part 6-5: Graphene-based materials - Contact and sheet resistance: transmission line measurement
Nanomanufacturing - Key control characteristics - Part 6-5: Graphene-based materials - Contact and sheet resistance: transmission line measurement.
IEC TS 62607-6-5:2022(E) establishes a standardized method to determine the key control characteristics
for graphene-based materials and other two-dimensional materials by a
The method uses test structures applied to the 2D material by photolithographic methods consisting of several metal electrodes with increasing spacing between the electrodes. By a measurement of the voltage drop between different pairs of electrodes, sheet resistance and contact resistance can be calculated.
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