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IEST RP-CC013.3

Calibration Procedures and Guidelines for Selecting Equipment Used in Testing Cleanrooms and Other Controlled Environments
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IEST RP-CC013.3 covers procedures for calibrating and verifying equipment used in char-acterizing cleanrooms and for determining intervals of calibration. The RP includes general procedures for calibrating aerosol generators, photometers, ane-mometers, airflow capture hoods, temperature measurement systems and devices, pressure and vacuum gauges, polymicrosphere (PSL) generators, aerosol diluters, and condensation nuclei counters. Where available, references for calibrating other instruments are provided
SDO IEST: Institute of Environmental Sciences and Technology
Document Number RP-CC013
Publication Date Aug. 1, 2012
Language en - English
Page Count 40
Revision Level
Supercedes
Committee
Publish Date Document Id Type View
Aug. 1, 2012 IEST RP-CC013.3 Revision