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ISO/TR 19319:2013

Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
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ISO/TR 19319:2013

Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

PUBLISH DATE 2013
ISO/TR 19319:2013

ISO/TR 19319:2013 describes: functions and their relevance to lateral resolution: point spread function (PSF), line spread function (LSF), edge spread function (ESF), modulation transfer function (MTF) and contrast transfer function (CTF);

experimental methods for the determination of lateral resolution and parameters related to lateral resolution: imaging of a narrow stripe, sharp edge and square-wave gratings;

physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.

SDO ISO: International Organization for Standardization
Document Number ISO/TR 19319
Publication Date March 15, 2013
Language en - English
Page Count
Revision Level
Supercedes
Committee ISO/TC 201/SC 2
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