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Automation systems and integration - Digital twin framework for manufacturing - Part 100: Use case on management of semiconductor ingot growth process
This document describes a digital twin for monitoring and controlling the semiconductor ingot growth process.
The use case is analysed and designed using the ISO 23247 series.
The result is a systematic view of the use case implementation and a high-level design of the digital twins, which can be directly implemented using the readily available tools and languages, including those supported by the relevant standards.
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