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ISO/TS 25138:2025

Surface chemical analysis - Analysis of metal oxide films by glow discharge optical emission spectrometry
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ISO/TS 25138:2025

Surface chemical analysis - Analysis of metal oxide films by glow discharge optical emission spectrometry

PUBLISH DATE 2025
ISO/TS 25138:2025

This document specifies a glow discharge optical emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.

This method is applicable to oxide films 5 nm to 10 000 nm thick on metals.

The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al.

Other elements that can be determined by the method are O, C, N, H, P and S.

SDO ISO: International Organization for Standardization
Document Number ISO/TS 25138
Publication Date Jan. 1, 2025
Language en - English
Page Count 46
Revision Level
Supercedes
Committee ISO/TC 201/SC 8
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