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ISO 11505:2025

Surface chemical analysis - General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry
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ISO 11505:2025

Surface chemical analysis - General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry

PUBLISH DATE 2025
ISO 11505:2025

This document specifies a glow discharge optical emission spectrometric (GD-OES) method for the determination of the thickness, mass per unit area and chemical composition of surface layer films.

The applicability of this document is limited to description of general procedures for quantification of the chemical composition and thickness in GD-OES compositional depth profiling. This document is not directly applicable for quantification of individual materials having various thicknesses and elements to be determined.

SDO ISO: International Organization for Standardization
Document Number ISO 11505
Publication Date Jan. 1, 2025
Language en - English
Page Count
Revision Level
Supercedes
Committee ISO/TC 201/SC 8
Publish Date Document Id Type View
Jan. 1, 2025 ISO 11505:2025 Revision
Dec. 15, 2012 ISO 11505:2012 Revision