This document specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1. Particle sizes range from 0,1 µm to equal to or larger than 5 µm (given in ISO 14644-1).
NOTEÂ Â Â Â Â Â Â Â Â Â Â Where regulatory agencies impose supplementary guidelines or restrictions, appropriate adaptation of the assessment methodology can be required.
This document is not applicable to the following items:
| SDO | ISO: International Organization for Standardization |
| Document Number | ISO 14644 |
| Publication Date | Not Available |
| Language | en - English |
| Page Count | 28 |
| Revision Level | |
| Supercedes | |
| Committee | ISO/TC 209 |
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