Surface chemical analysis - X-ray photoelectron spectroscopy - Procedures for assessing the day-to-day performance of an X-ray photoelectron spectrometer
This document is designed to allow the user to assess, on a regular basis, several key parameters of an Xβray photoelectron spectrometer. It is not intended to provide an exhaustive performance check, but instead provides a rapid set of tests that can be conducted frequently.
Aspects of instrument behaviour covered by this document include the vacuum, measurements of spectra of conductive or non-conductive test specimens and the current state of the Xβray source. Other important aspects of the instrument performance (e.g. lateral resolution) fall outside the scope of this document.
The document is intended for use with commercial Xβray photoelectron spectrometers equipped with a monochromated Al KΞ± Xβray source or with an unmonochromated Al or Mg KΞ± Xβray source.
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