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ISO 18115-3:2022

Surface chemical analysis - Vocabulary - Part 3: Terms used in optical interface analysis
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ISO 18115-3:2022

Surface chemical analysis - Vocabulary - Part 3: Terms used in optical interface analysis

PUBLISH DATE 2022
ISO 18115-3:2022

This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques.

It also covers general optical terms.

SDO ISO: International Organization for Standardization
Document Number ISO 18115
Publication Date July 1, 2022
Language en - English
Page Count
Revision Level
Supercedes
Committee ISO/TC 201/SC 1
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