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ISO 18516:2019

Surface chemical analysis - Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres
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ISO 18516:2019

Surface chemical analysis - Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres

PUBLISH DATE 2019
ISO 18516:2019

This document describes methods for measuring lateral resolution and sharpness in imaging surface chemical analysis. It applies to all methods of surface analysis which use a beam to analyse the chemical composition of surfaces under defined settings of an instrument.

It applies to scanning instruments, where a finely focused beam is scanned over the sample in a preselected field of view, as well as to full field imaging instruments, where the field of view is simultaneously imaged by a broad beam, an imaging lens system and a pixelated detector.

The methods for measuring lateral resolution and sharpness are:

  • the straight edge method;
  • the narrow line method;
  • the grating method.

This document applies to instruments and methods that provide information on layers with nanometre thicknesses and to surfaces with nanometre-sized structures and individual nano-objects.

SDO ISO: International Organization for Standardization
Document Number ISO 18516
Publication Date Jan. 1, 2019
Language en - English
Page Count
Revision Level
Supercedes
Committee ISO/TC 201/SC 2
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