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ISO 20341:2003

Surface chemical analysis - Secondary-ion mass spectrometry - Method for estimating depth resolution parameters with multiple delta-layer reference materials
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ISO 20341:2003

Surface chemical analysis - Secondary-ion mass spectrometry - Method for estimating depth resolution parameters with multiple delta-layer reference materials

PUBLISH DATE 2003
ISO 20341:2003

ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.

It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.

SDO ISO: International Organization for Standardization
Document Number ISO 20341
Publication Date July 15, 2003
Language en - English
Page Count
Revision Level
Supercedes
Committee ISO/TC 201/SC 6
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