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ISO 25178-603:2025

Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments
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This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.

SDO ISO: International Organization for Standardization
Document Number ISO 25178
Publication Date Jan. 1, 2025
Language en - English
Page Count 26
Revision Level
Supercedes
Committee ISO/TC 213
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