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ISO 25178-604:2025

Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments
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This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.

SDO ISO: International Organization for Standardization
Document Number ISO 25178
Publication Date Jan. 1, 2025
Language en - English
Page Count 30
Revision Level
Supercedes
Committee ISO/TC 213
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