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ISO 25178-607:2019

Geometrical product specifications (GPS) - Surface texture: Areal - Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments
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ISO 25178-607:2019

Geometrical product specifications (GPS) - Surface texture: Areal - Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments

PUBLISH DATE 2019
ISO 25178-607:2019

This document describes the *influence quantities* and *instrument characteristics* of confocal microscopy systems for *areal measurement* of surface topography.

Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.

SDO ISO: International Organization for Standardization
Document Number ISO 25178
Publication Date March 1, 2019
Language en - English
Page Count
Revision Level
Supercedes
Committee ISO/TC 213
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