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ISO 3530:1979

Vacuum technology -- Mass-spectrometer-type leak-detector calibration
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ISO 3530:1979

Vacuum technology -- Mass-spectrometer-type leak-detector calibration

PUBLISH DATE 1979
ISO 3530:1979

Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure.

Two procedures are outlined:

  • One to determine the minimum detectable leak rate
  • The other for determination of the minimum detectable concentration ratio.
SDO ISO: International Organization for Standardization
Document Number ISO 3530
Publication Date Sept. 1, 1979
Language en - English
Page Count
Revision Level
Supercedes
Committee ISO TC 112/SC 2
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