Logo
Login Sign Up
Current Revision

ISO IEC/TR 63258:2021

Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films
Best Price Guarantee

$51.59

2-5 Days

$51.59

SAVE 15%

$87.70


Sub Total (1 Item(s))

$ 0.00

Estimated Shipping

$ 0.00

Total (Pre-Tax)

$ 0.00


View in Library
or
International Organization for Standardization Logo

ISO IEC/TR 63258:2021

Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

PUBLISH DATE 2021
ISO IEC/TR 63258:2021

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films.

This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.

SDO ISO: International Organization for Standardization
Document Number IEC/TR 63258
Publication Date Jan. 1, 2021
Language en - English
Page Count
Revision Level
Supercedes
Committee ISO/TC 229
Loading...

Failed to load document history.

Publish Date Document Id Type View