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Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis
This document specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces.
This document also specifies a method for establishing a calibration schedule.
It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0.5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak.
It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.
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