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ISO 17973:2024

Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis
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ISO 17973:2024

Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis

PUBLISH DATE 2024
ISO 17973:2024

This document specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. This document also specifies a method for establishing a calibration schedule.

It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.

SDO ISO: International Organization for Standardization
Document Number ISO 17973
Publication Date Jan. 1, 2024
Language en - English
Page Count 18
Revision Level
Supercedes
Committee ISO/TC 201/SC 7
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