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ISO 18118:2024

Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials
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This document gives guidance on the measurement and use of experimentally-determined relative sensitivity factors for the quantitative analysis of homogeneous materials by Auger electron spectroscopy and X-ray photoelectron spectroscopy.

The methods described only apply to polycrystalline and amorphous materials, as effects inherent to single-crystal samples are not addressed.

SDO ISO: International Organization for Standardization
Document Number ISO 18118
Publication Date Feb. 1, 2024
Language en - English
Page Count
Revision Level
Supercedes
Committee ISO/TC 201/SC 7
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