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BSI BS EN 62047-10:2011

Semiconductor devices. Micro-electromechanical devices -- Micro-pillar compression test for MEMS materials
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BSI BS EN 62047-10:2011

Semiconductor devices. Micro-electromechanical devices -- Micro-pillar compression test for MEMS materials

PUBLISH DATE 2011
PAGES 18
BSI BS EN 62047-10:2011

This part of IEC 62047 specifies micro-pillar compression test method to measure compressive properties of MEMS materials with high accuracy, repeatability, and moderate effort of specimen fabrication. The uniaxial compressive stress-strain relationship of a specimen is measured, and the compressive modulus of elasticity and yield strength can be obtained.

The test piece is a cylindrical pillar fabricated on a rigid (or highly stiff) substrate by micro-machining technologies, and its aspect ratio (ratio of pillar diameter to pillar height) should be more than 3. This standard is applicable to metallic, ceramic, and polymeric materials.

SDO BSI: British Standards Institution
Document Number EN 62047-10
Publication Date Sept. 30, 2011
Language en - English
Page Count 18
Revision Level
Supercedes
Committee EPL/47
Publish Date Document Id Type View
Sept. 30, 2011 BS EN 62047-10:2011 Revision