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BSI BS IEC 62047-34:2019

Semiconductor devices. Micro-electromechanical devices -- Test methods for MEMS piezoresistive pressure-sensitive device on wafer
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BSI BS IEC 62047-34:2019

Semiconductor devices. Micro-electromechanical devices -- Test methods for MEMS piezoresistive pressure-sensitive device on wafer

PUBLISH DATE 2019
PAGES 18
BSI BS IEC 62047-34:2019
IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.
SDO BSI: British Standards Institution
Document Number IEC 62047-34
Publication Date April 16, 2019
Language en - English
Page Count 18
Revision Level
Supercedes
Committee EPL/47
Publish Date Document Id Type View
April 16, 2019 BS IEC 62047-34:2019 Revision