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IEC 62047-26 Ed. 1.0 b:2016

Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures
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International Electrotechnical Commission Logo

IEC 62047-26 Ed. 1.0 b:2016

Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures

PUBLISH DATE 2026
PAGES 62
IEC 62047-26 Ed. 1.0 b:2016
Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures
IEC 62047-26:2016 specifies descriptions of trench structure and needle structure in a micrometer scale. In addition, it provides examples of measurement for the geometry of both structures. For trench structures, this standard applies to structures with a depth of 1 µm to 100 µm; walls and trenches with respective widths of 5 µm to 150 µm; and aspect ratio of 0,006 7 to 20. For needle structures, the standard applies to structures with three or four faces with a height, horizontal width and vertical width of 2 µm or larger, and with dimensions that fit inside a cube with sides of 100 µm. This standard is applicable to the structural design of MEMS and geometrical evaluation after MEMS processes.
SDO IEC: International Electrotechnical Commission
Document Number IEC 62047
Publication Date April 1, 2026
Language b - English & French
Page Count 62
Revision Level 1.0
Supercedes
Committee 47F
Publish Date Document Id Type View
April 1, 2026 IEC 62047-26 Ed. 1.0 b:2016 Revision
Jan. 1, 2016 Revision