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IEC 62047-28 Ed. 1.0 en:2017

Semiconductor devices - Micro-electromechanical devices - Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices
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International Electrotechnical Commission Logo

IEC 62047-28 Ed. 1.0 en:2017

Semiconductor devices - Micro-electromechanical devices - Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices

PUBLISH DATE 2026
PAGES 22
IEC 62047-28 Ed. 1.0 en:2017
Semiconductor devices - Micro-electromechanical devices - Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices

IEC 62047-28:2017(E) specifies terms and definitions, and a performance testing method of vibration driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry or any application.
This document applies to vibration driven electret energy harvesting devices whose electrodes with a gap below 1 000 μm are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography or deposition.
 

SDO IEC: International Electrotechnical Commission
Document Number IEC 62047
Publication Date April 1, 2026
Language en - English
Page Count 22
Revision Level 1.0
Supercedes
Committee 47F
Publish Date Document Id Type View
April 1, 2026 IEC 62047-28 Ed. 1.0 en:2017 Revision
Jan. 1, 2017 Revision